Tests of the modified Sigmund model of ion sputtering using...

Tests of the modified Sigmund model of ion sputtering using Monte Carlo simulations

Hofsäss, Hans, Bradley, R. Mark
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Volume:
117
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.4919826
Date:
May, 2015
File:
PDF, 1.42 MB
english, 2015
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