Synthesis of metal silicide at metal/silicon oxide...

Journal of Applied Physics 2015 / 05 Vol. 117; Iss. 19

Synthesis of metal silicide at metal/silicon oxide interface by electronic excitation

Lee, J.-G., Nagase, T., Yasuda, H., Mori, H.
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Volume:
117
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.4921429
Date:
May, 2015
File:
PDF, 2.98 MB
english, 2015
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