SPIE Proceedings [SPIE SPIE's 1993 International Symposium on Optics, Imaging, and Instrumentation - San Diego, CA (Sunday 11 July 1993)] Multilayer and Grazing Incidence X-Ray/EUV Optics II - Image quality, surface statistics, and all that
Church, Eugene L., Takacs, Peter Z., Hoover, Richard B.Volume:
2011
Year:
1994
Language:
english
DOI:
10.1117/12.167229
File:
PDF, 826 KB
english, 1994