SPIE Proceedings [SPIE SPIE MOEMS-MEMS - San Francisco,...

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SPIE Proceedings [SPIE SPIE MOEMS-MEMS - San Francisco, California, United States (Saturday 1 February 2014)] MOEMS and Miniaturized Systems XIII - MEMS optical tunable filter based on free-standing subwavelength silicon layers

Piyawattanametha, Wibool, Park, Yong-Hwa, Omran, Haitham, Sabry, Yasser M., Sadek, Mohamed, Hassan, Khaled, Shalaby, Mohamed Y., Khalil, Diaa
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Volume:
8977
Year:
2014
Language:
english
DOI:
10.1117/12.2040767
File:
PDF, 2.22 MB
english, 2014
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