SPIE Proceedings [SPIE Industrial Lasers and Inspection (EUROPTO Series) - Munich, Germany (Monday 14 June 1999)] Laser Metrology and Inspection - Design and performance of an optical sensor for the measurement of surface roughness and waviness
Docchio, Franco, Minoni, Umberto, Rodella, Roberto, Rovati, Luigi, Corallo, Valeriano, Tiziani, Hans J., Rastogi, Pramod K.Volume:
3823
Year:
1999
Language:
english
DOI:
10.1117/12.360985
File:
PDF, 813 KB
english, 1999