SPIE Proceedings [SPIE SPIE Proceedings - (Sunday 12 February 2012)] - Optical and photoelectrical characterization of as-deposited and annealed PECVD polysilicon thin films
Khomich, A. V., Kovalev, V. I., Vedeneev, A. S., Kazanskii, A. G., Forsh, P. A., He, Deyan, Wang, X. Q., Mell, H., Vlasov, I. I., Zavedeev, E. V., Valiev, Kamil A., Orlikovsky, Alexander A.Year:
2012
Language:
english
DOI:
10.1117/12.557905
File:
PDF, 521 KB
english, 2012