SPIE Proceedings [SPIE Optical Science and Technology, the SPIE 49th Annual Meeting - Denver, CO (Monday 2 August 2004)] Interferometry XII: Techniques and Analysis - Design considerations and validation of the MSTAR absolute metrology system
Peters, Robert D., Lay, Oliver P., Dubovitsky, Serge, Burger, Johan, Jeganathan, Muthu, Creath, Katherine, Schmit, JoannaVolume:
5531
Year:
2004
Language:
english
DOI:
10.1117/12.560036
File:
PDF, 341 KB
english, 2004