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SPIE Proceedings [SPIE MOEMS-MEMS Micro & Nanofabrication - San Jose, CA (Saturday 22 January 2005)] MOEMS Display and Imaging Systems III - Highly reflective coatings for micromechanical mirror arrays operating in the DUV and VUV spectral range
Sandner, Thilo, Schmidt, Jan U., Schenk, Harald, Lakner, Hubert, Gatto, Alexandre, Yang, Minghong, Kaiser, Norbert, Braun, Stefan, Foltyn, Thomas, Leson, Andreas, Urey, Hakan, Dickensheets, David L.Volume:
5721
Year:
2005
Language:
english
DOI:
10.1117/12.590522
File:
PDF, 550 KB
english, 2005