Height Measurement Using High-Precision Atomic Force...

Japanese Journal of Applied Physics 2006 / 11 Vol. 45; Iss. 11

Height Measurement Using High-Precision Atomic Force Microscope Scanner Combined with Laser Interferometers

Murayama, Ken, Gonda, Satoshi, Kinoshita, K., Koyanagi, Hajime, Terasawa, Tsuneo, Hosaka, Sumio
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Volume:
45
Language:
english
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/jjap.45.8832
Date:
November, 2006
File:
PDF, 417 KB
english, 2006
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