[ACM Press the 46th Annual Design Automation Conference - San Francisco, California (2009.07.26-2009.07.31)] Proceedings of the 46th Annual Design Automation Conference on ZZZ - DAC '09 - Predicting variability in nanoscale lithography processes
Drmanac, Dragoljub Gagi, Liu, Frank, Wang, Li-C.Year:
2009
Language:
english
DOI:
10.1145/1629911.1630053
File:
PDF, 413 KB
english, 2009