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[ACM Press the 48th Design Automation Conference - San Diego, California (2011.06.05-2011.06.10)] Proceedings of the 48th Design Automation Conference on - DAC '11 - Flexible 2D layout decomposition framework for spacer-type double pattering lithography
Ban, Yongchan, Lucas, Kevin, Pan, DavidYear:
2011
Language:
english
DOI:
10.1145/2024724.2024901
File:
PDF, 1.25 MB
english, 2011