Study of Chemical Vapor Deposition of Manganese on Porous...

Electrochemical and Solid-State Letters 2012 Vol. 15; Iss. 5

Study of Chemical Vapor Deposition of Manganese on Porous SiCOH Low-k Dielectrics Using Bis(ethylcyclopentadienyl)manganese

Jourdan, Nicolas, Krishtab, Mikhail B., Baklanov, Mikhail R., Meersschaut, Johan, Wilson, Christopher J., Ablett, James M., Fonda, Emiliano, Zhao, Larry, Van Elshocht, Sven, Tökei, Zsolt, Vancoille,
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Volume:
15
Year:
2012
Language:
english
Journal:
Electrochemical and Solid-State Letters
DOI:
10.1149/2.006206esl
File:
PDF, 200 KB
english, 2012
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