[Journal of the Physical Society of Japan Proceedings of the 12th Asia Pacific Physics Conference (APPC12) - Makuhari, Japan (July 14–19, 2013)] Proceedings of the 12th Asia Pacific Physics Conference (APPC12) - Application of Coaxial Ion Gun for Film Generation and Ion Implantation
Takatsu, Mikio, Asai, Tomohiko, Kurumi, Satoshi, Suzuki, Kaoru, Hirose, Hideharu, Masutani, ShigeyukiYear:
2014
Language:
english
DOI:
10.7566/jpscp.1.015086
File:
PDF, 732 KB
english, 2014