Positioning control effectiveness of optical knife edge displacement sensor-embedded monolithic precision stage
Lee, ChaBum, Lee, Sun-Kyu, Tarbutton, Joshua A.Volume:
233
Language:
english
Journal:
Sensors and Actuators A: Physical
DOI:
10.1016/j.sna.2015.07.035
Date:
September, 2015
File:
PDF, 1.84 MB
english, 2015