![](/img/cover-not-exists.png)
Annealing and excitation dependent photoluminescence of silicon rich silicon nitride films with silicon quantum dots
Liao, Wugang, Zeng, Xiangbin, Wen, Xixing, Chen, Xiaoxiao, Wang, WenzhaoLanguage:
english
Journal:
Vacuum
DOI:
10.1016/j.vacuum.2015.08.002
Date:
August, 2015
File:
PDF, 1.51 MB
english, 2015