Laser-annealed refractory metal silicide films on GaAs

Electronics Letters 1990 / 01 Vol. 26; Iss. 1

Laser-annealed refractory metal silicide films on GaAs

Anderson, W.T., Christou, A., Thompson, P.E., Gossett, C.R., Eridon, J.M., Hatzopoulos, Z., Efthimiopoulos, T., Kudumas, M., Michelakis, C., Morgan, D.V.
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Volume:
26
Language:
english
Journal:
Electronics Letters
DOI:
10.1049/el:19900041
Date:
January, 1990
File:
PDF, 441 KB
english, 1990
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