Selective plasma etching of Si from GaAs-on-Si wafers for...

Electronics Letters 1990 Vol. 26; Iss. 13

Selective plasma etching of Si from GaAs-on-Si wafers for microwave via-hole formation

Turner, G.W., Chen, C.L., Connors, M.K., Mahoney, L.J., McGilvary, W.L.
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Volume:
26
Year:
1990
Language:
english
Journal:
Electronics Letters
DOI:
10.1049/el:19900559
File:
PDF, 378 KB
english, 1990
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