Deep erbium-ytterbium implantation codoping of low-loss...

Electronics Letters 1995 Vol. 31; Iss. 8

Deep erbium-ytterbium implantation codoping of low-loss silicon oxynitride waveguides

Chelnokov, A.V., Lourtioz, J.-M., Boucaud, Ph., Bernas, H., Chaumont, J., Plowman, T.
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Volume:
31
Year:
1995
Journal:
Electronics Letters
DOI:
10.1049/el:19950455
File:
PDF, 337 KB
1995
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