Nano/microchannel fabrication based on SU-8 using...

Micro & Nano Letters 2012 / 12 Vol. 7; Iss. 12

Nano/microchannel fabrication based on SU-8 using sacrificial resist etching method

Li, Xiaojun, Li, Xin, Di, Si, Jin, Jian, Wang, Xudi
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Volume:
7
Language:
english
Journal:
Micro & Nano Letters
DOI:
10.1049/mnl.2012.0775
Date:
December, 2012
File:
PDF, 335 KB
english, 2012
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