SU-8 piezoresistive microcantilever with high gauge factor

Micro & Nano Letters 2013 / 03 Vol. 8; Iss. 3

SU-8 piezoresistive microcantilever with high gauge factor

Devarajan, Mutharasu, Sidek, Othman, Kok Siong, Lee, Ibrahim, Kamarulazizi, Abdul Azid, Ishak
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Volume:
8
Language:
english
Journal:
Micro & Nano Letters
DOI:
10.1049/mnl.2012.0736
Date:
March, 2013
File:
PDF, 343 KB
english, 2013
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