[AIP APPLICATION OF ACCELERATORS IN RESEARCH AND INDUSTRY: 17TH International Conference on the Application of Accelerators in Research and Industry - Denton, Texas (USA) (12-16 November 2002)] AIP Conference Proceedings - Optical thin film deposition with O2 cluster ion beam assisted deposition
Toyoda, NoriakiVolume:
680
Year:
2003
Language:
english
DOI:
10.1063/1.1619813
File:
PDF, 358 KB
english, 2003