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[AIP CHARACTERIZATION AND METROLOGY FOR ULSI TECHNOLOGY: 2003 International Conference on Characterization and Metrology for ULSI Technology - Austin, Texas (USA) (24-28 March 2003)] AIP Conference Proceedings - High Resolution X-ray Scattering Methods For ULSI Materials Characterization
Matyi, Richard J.Volume:
683
Year:
2003
Language:
english
DOI:
10.1063/1.1622538
File:
PDF, 949 KB
english, 2003