Comment on “Ion energy uniformity in high-frequency...

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Comment on “Ion energy uniformity in high-frequency capacitive discharges” [Appl. Phys. Lett. 86, 021501 (2005)]

A. A. Howling, L. Sansonnens, H. Schmidt, C. Hollenstein
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Year:
2005
Language:
english
DOI:
10.1063/1.2012528
File:
PDF, 400 KB
english, 2005
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