Comment on “Ion energy uniformity in high-frequency capacitive discharges” [Appl. Phys. Lett. 86, 021501 (2005)]
A. A. Howling, L. Sansonnens, H. Schmidt, C. HollensteinYear:
2005
Language:
english
DOI:
10.1063/1.2012528
File:
PDF, 400 KB
english, 2005