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[AIP SYNCHROTRON RADIATION INSTRUMENTATION: Ninth International Conference on Synchrotron Radiation Instrumentation - Daegu (Korea) (28 May-2 June 2006)] AIP Conference Proceedings - High-Precision Multilayer Coatings and Reflectometry for EUV Lithography Optics
Braun, Stefan, Gawlitza, Peter, Menzel, Maik, Schädlich, Stefan, Leson, AndreasVolume:
879
Year:
2007
Language:
english
DOI:
10.1063/1.2436345
File:
PDF, 344 KB
english, 2007