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[AIP CHARACTERIZATION AND METROLOGY FOR NANOELECTRONICS: 2007 International Conference on Frontiers of Characterization and Metrology - Gaithersburg, MD (27-29 March 2007)] AIP Conference Proceedings - NIST Traceable Small Signal Surface Photo Voltage Reference Wafer
Bertuch, Adam, Steeples, Kenneth, Seiler, David G., Diebold, Alain C., McDonald, Robert, Garner, C. Michael, Herr, Dan, Khosla, Rajinder P., Secula, Erik M.Volume:
931
Year:
2007
Language:
english
DOI:
10.1063/1.2799378
File:
PDF, 632 KB
english, 2007