[AIP CHARACTERIZATION AND METROLOGY FOR NANOELECTRONICS: 2007 International Conference on Frontiers of Characterization and Metrology - Gaithersburg, MD (27-29 March 2007)] AIP Conference Proceedings - Under-bump Metallization (UBM) Control using X-ray Fluorescence (XRF)
Agnihotri, Dileep, Brown, Dave, Imhof, Joseph, O'Dell, Jeremy, Tokar, Alex, Seiler, David G., Diebold, Alain C., McDonald, Robert, Garner, C. Michael, Herr, Dan, Khosla, Rajinder P., Secula, Erik M.Volume:
931
Year:
2007
Language:
english
DOI:
10.1063/1.2799397
File:
PDF, 1.51 MB
english, 2007