Inhomogeneous decomposition of ultrathin oxide films on...

The Journal of Chemical Physics 2008 Vol. 128; Iss. 16

Inhomogeneous decomposition of ultrathin oxide films on Si(100): Application of Avrami kinetics to thermal desorption spectra

Kinefuchi, Ikuya, Yamaguchi, Hiroki, Sakiyama, Yukinori, Takagi, Shu, Matsumoto, Yoichiro
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Volume:
128
Year:
2008
Language:
english
Journal:
The Journal of Chemical Physics
DOI:
10.1063/1.2905209
File:
PDF, 600 KB
english, 2008
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