[AIP LASER AND PLASMA APPLICATIONS IN MATERIALS SCIENCE: First International Conference on Laser Plasma Applications in Materials Science—LAPAMS’08 - Algiers (Algeria) (23–26 June 2008)] AIP Conference Proceedings - Effects Of Pressure And Power On The Ionic Saturation Current And Self-Bias Voltage In A RF Discharge 13.56 MHz Of (SF[sub 6], O[sub 2]) At Low Pressure

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