Direct photoetching of polymers using radiation of high...

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Direct photoetching of polymers using radiation of high energy density from a table-top extreme ultraviolet plasma source

F. Barkusky, A. Bayer, C. Peth, K. Mann
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Year:
2009
Language:
english
DOI:
10.1063/1.3054565
File:
PDF, 999 KB
english, 2009
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