[AIP FRONTIERS OF CHARACTERIZATION AND METROLOGY FOR NANOELECTRONICS: 2009 - Albany (New York) (11–15 May 2009)] AIP Conference Proceedings - Spectroscopic Scatterfield Microscopy
Barnes, B. M., Heckert, N. A., Quintanilha, R., Zhou, H., Silver, R. M., Secula, Erik M., Seiler, David G., Khosla, Rajinder P., Herr, Dan, Michael Garner, C., McDonald, Robert, Diebold, Alain C.Year:
2009
Language:
english
DOI:
10.1063/1.3251230
File:
PDF, 2.14 MB
english, 2009