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[AIP FRONTIERS OF CHARACTERIZATION AND METROLOGY FOR NANOELECTRONICS: 2009 - Albany (New York) (11–15 May 2009)] AIP Conference Proceedings - Simulations of Scatterometry Down to 22 nm Structure Sizes and Beyond with Special Emphasis on LER
Osten, W., Ferreras Paz, V., Frenner, K., Schuster, T., Bloess, H., Secula, Erik M., Seiler, David G., Khosla, Rajinder P., Herr, Dan, Michael Garner, C., McDonald, Robert, Diebold, Alain C.Year:
2009
Language:
english
DOI:
10.1063/1.3251253
File:
PDF, 1.48 MB
english, 2009