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AIP Conference Proceedings [AIP ION IMPLANTATION TECHNOLOGY 2101: 18th International Conference on Ion Implantation Technology IIT 2010 - Kyoto, (Japan) (6–11 June 2010)] - SEN Ultra-High Energy Implanter (UHE) Developed for Next Generation Image Sensors
Suetsugu, Noriyuki, Tsukihara, Mitsukuni, Fuse, Genshu, Ueno, Kazuyoshi, Sugitani, Michiro, Matsuo, Jiro, Kase, Masataka, Aoki, Takaaki, Seki, ToshioYear:
2011
Language:
english
DOI:
10.1063/1.3548422
File:
PDF, 305 KB
english, 2011