AIP Conference Proceedings [AIP ENABLING SCIENCE AND...

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AIP Conference Proceedings [AIP ENABLING SCIENCE AND NANOTECHNOLOGY: 2010 International Conference On Enabling Science And Nanotechnology Escinano2010 - Kuala Lumpur, (Malaysia) (1–3 December 2010)] - Design of an Electrostatic Comb Actuator Based on Finite Element Method

Mon, Thet Thet, Ghazalli, Zakri, Ahmad, Asnul Hadi, Ismail, Mohd Fazli, Muhamad, Khairul Fikri, Hashim, Abdul Manaf, Arora, Vijay K.
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Year:
2011
Language:
english
DOI:
10.1063/1.3587028
File:
PDF, 1.78 MB
english, 2011
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