AIP Conference Proceedings [AIP FRONTIERS OF CHARACTERIZATION AND METROLOGY FOR NANOELECTRONICS: 2011 - Grenoble (France) (23–26 May 2011)] - Field Mapping Of Semiconductors In A State-Of-The-Art Electron Microscope
Cooper, David, Béché, Armand, Rouvière, Jean-Luc, Servanton, Germain, Pantel, Roland, Morin, Pierre, Chabli, Amal, Seiler, David G., Diebold, Alain C., McDonald, Robert, Chabli, Amal, Secula, ErikYear:
2011
Language:
english
DOI:
10.1063/1.3657867
File:
PDF, 2.76 MB
english, 2011