AIP Conference Proceedings [AIP APPLICATION OF ACCELERATORS IN RESEARCH AND INDUSTRY: Twenty-Second International Conference - Ft. Worth, TX, USA (5–10 August 2012)] - Sub-10 nm nanofabrication with the helium and neon ions in ORION NanoFab
Singh, BipinYear:
2013
Language:
english
DOI:
10.1063/1.4802357
File:
PDF, 1.32 MB
english, 2013