In situ high-temperature characterization of AlN-based surface acoustic wave devices
Aubert, Thierry, Bardong, Jochen, Legrani, Ouarda, Elmazria, Omar, Badreddine Assouar, M., Bruckner, Gudrun, Talbi, AbdelkrimVolume:
114
Year:
2013
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.4812565
File:
PDF, 2.31 MB
english, 2013