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AIP Conference Proceedings [AIP Publishing LLC INTERNATIONAL CONFERENCE ON PHYSICAL MESOMECHANICS OF MULTILEVEL SYSTEMS 2014 - Tomsk, Russia (3–5 September 2014)] - The influence of vacancy generation at the initial stage of ion implantation
Parfenova, Elena S., Knyazeva, Anna G.Volume:
1623
Year:
2014
Language:
english
DOI:
10.1063/1.4901496
File:
PDF, 470 KB
english, 2014