Physical mechanisms of SiNx layer structuring with...

Journal of Applied Physics 2015 / 03 Vol. 117; Iss. 10

Physical mechanisms of SiNx layer structuring with ultrafast lasers by direct and confined laser ablation

Rapp, S., Heinrich, G., Wollgarten, M., Huber, H. P., Schmidt, M.
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Volume:
117
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.4914457
Date:
March, 2015
File:
PDF, 1.74 MB
english, 2015
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