Influence of surface morphology on sputtering yields
Wei, Qiangmin, Eddy, Michaela, Li, Kun-Dar, Wang, LuminVolume:
42
Language:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/0022-3727/42/16/165304
Date:
August, 2009
File:
PDF, 193 KB
english, 2009