A subnanometre heterodyne interferometric system with...

Measurement Science and Technology 2001 / 02 Vol. 12; Iss. 2

A subnanometre heterodyne interferometric system with improved phase sensitivity using a three-longitudinal-mode He-Ne laser

Yokoyama, Toshiyuki, Araki, Tsutomu, Yokoyama, Shuko, Suzuki, Norihito
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Volume:
12
Language:
english
Journal:
Measurement Science and Technology
DOI:
10.1088/0957-0233/12/2/305
Date:
February, 2001
File:
PDF, 137 KB
english, 2001
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