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On-machine measurement of a slow slide servo diamond-machined 3D microstructure with a curved substrate
Zhu, Wu-Le, Yang, Shunyao, Ju, Bing-Feng, Jiang, Jiacheng, Sun, AnyuVolume:
26
Language:
english
Journal:
Measurement Science and Technology
DOI:
10.1088/0957-0233/26/7/075003
Date:
July, 2015
File:
PDF, 2.70 MB
english, 2015