Foil level packaging of a chemical gas sensor

Journal of Micromechanics and Microengineering 2010 / 05 Vol. 20; Iss. 5

Foil level packaging of a chemical gas sensor

Courbat, J, Briand, D, de Rooij, N F
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Volume:
20
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/20/5/055026
Date:
May, 2010
File:
PDF, 1.12 MB
english, 2010
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