Meso-scale ceramic hotplates – A playground for high temperature microsystems
Jiang, Bo, Muralt, Paul, Maeder, ThomasVolume:
221
Language:
english
Journal:
Sensors and Actuators B: Chemical
DOI:
10.1016/j.snb.2015.06.127
Date:
December, 2015
File:
PDF, 3.50 MB
english, 2015