Millimeter-Scale Traveling Wave Rotary Ultrasonic Motors

Journal of Microelectromechanical Systems 2015 / 2 Vol. 24; Iss. 1

Millimeter-Scale Traveling Wave Rotary Ultrasonic Motors

Rudy, Ryan Q., Smith, Gabriel L., DeVoe, Don L., Polcawich, Ronald G.
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Volume:
24
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2014.2317778
Date:
February, 2015
File:
PDF, 2.09 MB
english, 2015
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