Surface Passivation of Germanium Using SF6 Plasma to Reduce...

IEEE Electron Device Letters 2015 / 8 Vol. 36; Iss. 8

Surface Passivation of Germanium Using SF6 Plasma to Reduce Source/Drain Contact Resistance in Germanium n-FET

Kim, Gwang-Sik, Kim, Seung-Hwan, Kim, Jeong-Kyu, Shin, Changhwan, Park, Jin-Hong, Saraswat, Krishna C., Cho, Byung Jin, Yu, Hyun-Yong
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Volume:
36
Language:
english
Journal:
IEEE Electron Device Letters
DOI:
10.1109/LED.2015.2440434
Date:
August, 2015
File:
PDF, 688 KB
english, 2015
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