[IEEE TRANSDUCERS 2015 - 2015 18th International Solid-State Sensors, Actuators and Microsystems Conference - Anchorage, AK, USA (2015.6.21-2015.6.25)] 2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) - On-chip ovenization of encapsulated Disk Resonator Gyroscope (drg)
Ahn, C.H., Hong, V.A., Park, W., Yang, Y., Chen, Y., Ng, E.J., Huynh, J., Challoner, A.D., Goodson, K.E., Kenny, T.W.Year:
2015
Language:
english
DOI:
10.1109/TRANSDUCERS.2015.7180855
File:
PDF, 2.09 MB
english, 2015