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[IEEE 2015 China Semiconductor Technology International Conference (CSTIC) - Shanghai, China (2015.3.15-2015.3.16)] 2015 China Semiconductor Technology International Conference - 40nm offset spacer process optimization to improve device stability and mismatch
Chen Ji,, Zhibin He,, Xubin Jing,, Wei Liu,, Wenlong Chang,, Yu Zhang,, Albert Pang,Year:
2015
Language:
english
DOI:
10.1109/cstic.2015.7153326
File:
PDF, 1.01 MB
english, 2015