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[IEEE 30th European Solid-State Device Research Conference - Cork, Ireland (2000.9.11-2000.9.13)] 30th European Solid-State Device Research Conference - Optimisation of a Pre-Metal-Dielectric with a contact etch stop layer for 0.18um and 0.13um technologies
De Jaeger, B., Van den bosch, G., Van Hove, M., Debusschere, I., Schaekers, M., Badenes, G.Year:
2000
Language:
english
DOI:
10.1109/essderc.2000.194764
File:
PDF, 117 KB
english, 2000