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[IEEE 31st European Solid-State Device Research Conference - Nuremberg, Germany (2001.9.11-2001.9.13)] 31st European Solid-State Device Research Conference - Multiple Gate Oxide Technology Using Fluorine Implantation
Woerlee, P.H., Knitel, M.J., Meyssen, V.M.H., Velghe, R.M.D.A., Zegers van Duijnhoven, A.T.A.Year:
2001
Language:
english
DOI:
10.1109/essderc.2001.195212
File:
PDF, 416 KB
english, 2001