[IEEE 31st European Solid-State Device Research Conference - Nuremberg, Germany (2001.9.11-2001.9.13)] 31st European Solid-State Device Research Conference - Characterization of ultra thin high K gate dielectrics by grazing x-ray reflectance and Spectroscopic Ellipsometry on the same instrument
Boher, P., Stehle, J.-L., Defranoux, C., Bourtault, S., Piel, J.-P., Evrard, P.Year:
2001
Language:
english
DOI:
10.1109/essderc.2001.195283
File:
PDF, 58 KB
english, 2001